INSPECTION SENSITIVITY EVALUATION METHOD

专利名称：INSPECTION SENSITIVITY EVALUATION

METHOD

发明人：Hideaki HASHIMOTO,Nobutaka KIKUIRI申请号：US14278212申请日：20140515

公开号：US20140348414A1公开日：20141127

专利附图：

摘要：An inspection sensitivity evaluation method includes generating a referencedesign image where plural figure patterns are arranged, based on reference design data,generating plural position shift design images whose positional deviation amounts are

mutually different such that positions of the plural figure patterns in the referencedesign image are uniformly shifted, acquiring an optical image of a photo mask fabricatedbased on the reference design data where there is no positional deviation from the pluralfigure patterns, calculating a first positional deviation amount between the referencedesign image and the optical image, calculating plural second positional deviationamounts each of which is a respective positional deviation amount between a

corresponding position shift design image of the plural position shift design images andthe optical image, and acquiring a detectable positional deviation amount by using thefirst and the plural second positional deviation amounts.

申请人：NuFlare Technology, Inc.

地址：Yokohama JP

国籍：JP

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