USE OF AN OPTICAL FIBRE DEVICE FOR INTERFEROMETRIC

专利名称：USE OF AN OPTICAL FIBRE DEVICE FOR

INTERFEROMETRIC ANALYSIS OF THESURFACE CONDITION OF AN OBJECT

发明人：CHEVRIER, JOËL,HUANT, SERGE,SCHWARTZ,

WILFRID,SIRIA, ALESSANDRO

申请号：EP09805803.5申请日：20091229公开号：EP2370779B1公开日：20140521

摘要：The invention relates to an optical device for the interferometric analysis of thesurface condition of an object (2), including: a light source (1); an optical fibre (42) capableof receiving the incident light wave and transmitting said wave to the object (2); adetector (9) capable of detecting a combination between a light wave (45) reflected bythe optical fibre and a light wave (46) returned by the object; and in which the opticalfibre (42) has a free end in the shape of a cone, with a vertex angle of between 15 and 25degrees, the tip of the cone having dimensions of less than 50 x 50 nm, and the tip of thecone being placed, while in use, at a distance of between 5 and 50 μm from the surface ofthe object.

申请人：UNIVERSITÉ JOSEPH FOURIER,Université Joseph Fourier,Université JosephFourier,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,CENTRE NAT RECHSCIENT,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,COMMISSARIAT ÀL'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES,COMMISSARIAT L ÉNERGIEATOMIQUE ET AUX ÉNERGIES ALTERNATIVES,COMMISSARIAT À L'ÉNERGIE ATOMIQUE

ET AUX ÉNERGIESALTERNATIVES

地址：FR,FR,FR

国籍：FR,FR,FR

代理机构：Thibon, Laurent

更多信息请下载全文后查看