专利名称：METHOD AND DEVICE FOR ALIGNING,
CONTROLLING AND/OR MEASURINGBIDIMENSIONAL OBJECTS
发明人：SCHUSTER, Erich申请号：EP86902316.0申请日：19860403公开号：EP0222787A1公开日：19870527
摘要： This is a method to align, monitor and measure two-dimensional objectsdistributed on a table of a measuring apparatus, the table being movable in two
perpendicular directions of a coordinate system. We projected light onto the object. It isformed by uniting a beam of rays that can be differentiated by coordinate directionswhich are allocated to them. These rays passing through a common image plane aredeflected by the optical elements in directions corresponding to the assigned
coordinates and are projected onto the corresponding measuring objects. To illuminatethe object structures are produced for each coordinate direction of a light beam andthereby illuminated structures appear separated from the coordinate direction forforming images on the feelers. The structure of images will be translated in twocoordinate directions and the luminous flux on the feelers will be transformed intoelectrical signals. These signals are used for information, control and / or regulation.
申请人：ERNST LEITZ WETZLAR GMBH
地址：Ernst-Leitz-Strasse 30 Postfach 20 20 D-6330 Wetzlar 1 DE
国籍：DE
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