专利名称：Apparatus and method for electrical testing
of electrical circuits
发明人：Dan Zemer,Eyal Harel申请号：US10737863申请日：20031218
公开号：US20040140825A1公开日：20040722
专利附图：
摘要：Apparatus for electrical testing of electrical circuits includes an array of probesarranged for selective engagement with portions of electrical circuits to be tested,testing circuitry associated with the array of probes for sensing electrical characteristics
of the electrical circuits engaged by the array of probes, and control circuitry associatedwith the array of probes for causing engagement between selected ones of the array ofprobes with selected ones of the portions of electrical circuits to be tested. The array ofprobes includes at least two static probe assemblies arranged in a fixed array, and thestatic probe assemblies include a selectively positionable probe element and a probeelement positioner. The apparatus is employed to test electrical circuits duringfabrication.
申请人：ORBOTECH, LTD.
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