Arrangement for the separation of particles from a

专利名称：Arrangement for the separation of particles

from a plasma

发明人：Carl-Friedrich Meyer申请号：US11709283申请日：20070222

公开号：US20070209934A1公开日：20070913

专利附图：

摘要：The invention relates to an arrangement for the separation of particles from aplasma used for the coating of substrates under vacuum conditions. It can be usedparticularly advantageously in a method in which the plasma is formed by means of

electrical arc discharge. It is the object of the invention to propose a solution which iseasy to realize and with which particles can be separated from a plasma made for theformation of coatings such that they are not incident onto the surface of a substrate tobe coated, with large targets being able to be used for the plasma formation. In thearrangement in accordance with the invention, a plasma is formed from a target that canbe connected as a cathode and positive charge carriers of the plasma are accelerated inthis process in the direction of a surface of a substrate to be coated by means of at leastone absorber electrode connected to an electrical potential positive with respect to theplasma. In this connection, the absorber electrode should be arranged and orientatedsuch that a direct incidence of plasma onto the absorber electrode is avoided. Theabsorber electrode can, for example, be designed in plate form or in a similar form andcan be aligned at an obliquely inclined angle which takes account of the divergence of theplasma flow. In addition, at least one permanent magnet element or electromagnetelement is a component of the arrangement.

申请人：Carl-Friedrich Meyer

地址：Dresden DE

国籍：DE

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