APPARATUS AND METHOD OF PERFORMING SPECTROSCOPY IN

专利名称：APPARATUS AND METHOD OF

PERFORMING SPECTROSCOPY IN ATRANSMISSION CHARGED-PARTICLEMICROSCOPE

发明人：Mele, Luigi,Sluijterman, Albertus,Veen, van,

Gerard

申请号：EP15159576.6申请日：20150318公开号：EP3070732A1公开日：20160921

专利附图：

摘要：A Transmission Charged-Particle Microscope, comprising: - A specimen holder,for holding a specimen; - A source, for producing a beam of charged particles; - Anilluminator, for directing said beam so as to irradiate the specimen; - An imaging system,for receiving a flux of charged particles transmitted through the specimen and directing itonto a spectroscopic apparatus comprising: ▪ A dispersing device, for dispersing said fluxinto an energy-resolved array of spectral sub-beams distributed along a dispersiondirection; ▪ A detector, said detector comprising an assembly of sub-detectors arrangedalong said dispersion direction, whereby different sub-detectors are adjustable to havedifferent detection sensitivities.

申请人：FEI COMPANY

地址：5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US

国籍：US

代理机构：Bakker, Hendrik

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