专利名称：Acceleration sensor and method of
manufacture
发明人：Gary J. O'Brien申请号：US09502806申请日：20000211公开号：US06401536B1公开日：20020611
专利附图：
摘要：An acceleration sensor includes a substrate (), a proof mass () over thesubstrate and having first and second attachment regions (), and an anchor structure ()coupled to the substrate. The sensor additionally includes a first suspension beam ()
coupling the anchor structure to the first attachment region to suspend the proof massover the substrate. The sensor further includes a second suspension beam () coupling theanchor structure to the second attachment region to suspend the proof mass over thesubstrate. The first suspension beam has a first radius () extending from the anchorstructure to the first attachment region, and the second suspension beam has a secondradius () extending from the anchor structure to the second attachment region where thefirst radius is greater than the second radius.
申请人：MOTOROLA, INC.
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