专利名称:Apparatus for measuring thickness发明人:Gignoux, Dominique,Murray, Russell申请号:EP82108258.3申请日:19820908公开号:EP0075190B1公开日:190301
摘要:A thickness gauge of the kind consisting of a radiation source (10) producing abeam (12) aimed at a detector (14) whereby a material (20) to be gauged obstructs theradiation beam, so that the intensity of radiation received by the detector, and hence thedetector output (I) varies and said variation can be translated into a thickness
measurement (X). Standards (18) are used for calibration and computer means (16) ansmethods provide better measurements by using a function relating the thickness to thedetector output in a large range and independently of random inaccuracies of thestandards.
申请人:DATA MEASUREMENT CORPORATION
代理机构:JENSEN & SON
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