Cantilever array, method for fabricating the same,

专利名称：Cantilever array, method for fabricating the

same, scanning probe microscope, slidingapparatus of guiding and rotatingmechanism, sensor, homodyne laserinterferometer, laser doppler

interferometer having optically excitingfunction for exciting sample, each using thesame, and method for exciting cantilevers

发明人：Hideki Kawakatsu申请号：US114987申请日：20060619

公开号：US20070018096A1公开日：20070125

专利附图：

摘要：A cantilever array having a simple structure and being able to reliably detect asurface of a sample, a method for fabricating the same, a scanning probe microscope, asliding apparatus of a guiding and rotating mechanism, a sensor, a homodyne laserinterferometer, a laser Doppler interferometer having an optically exciting function forexciting a sample, each using the same, and a method for exciting cantilevers. Thecantilever array includes a large number of compliant cantilevers sliding on a surface of asample.

申请人：Hideki Kawakatsu

地址：Tokyo JP

国籍：JP

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