CLEAN ROOM SYSTEM

申请(专利)号： JP19950235145

专利号： JPH0979630A 主分类号： F24F7/06 申请权利人： OHBAYASHI

CORP 公开国代码： JP 优先权国家： JP

摘 要：

PROBLEM TO BE SOLVED: To enable reducing the number of filters by providing throughout the surface of the ceiling on the downstream side of filters arranged at intervals from one another on the ceiling a pressure resistive plate having different pressure resistance coefficients in order for there to be a current of air blown out evenly. ;SOLUTION: A flow of air supplied from an air-conditioning system, after passage through a ceiling chamber 10 and filters 13 and by removal of dust in suspension thereby, becomes clean air, which flows through a pressure resistive plate 15 and into a clean room 11. In this instance, to obtain an even flow of air blown out, the pressure resistance plate 15 is so formed as to have the pressure resistance coefficient R1 directly under the filter 13 larger than the pressure resistance coefficient R2 at a position at some distance from the filter 13. Since, as a result, it becomes possible to extend the range covered by an individual filter 13, a unidirectional flow of air is obtainable inside the clean room

independent of a decrease in number of

申请日： 1995-09-13 公开公告日： 1997-03-28

分类号： F24F7/06 发明设计人： SHA KUNIHEI;

SAITO TAKAO 申请国代码： JP

优先权： 19950913 JP

23514595

摘 要 附 图：

the filters 13.;COPYRIGHT: (C)1997,JPO 主权项：

【請求項1】 天井チャンバ、クリーンルーム、リターンチャンバを備え、気流が室内を一様に一方向に流れる一方向流型クリーンルームシステムにおいて、天井面にフィルタを互いに間隔を隔てて配置し、前記フィルタ

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