Systems for managing production information

专利名称：Systems for managing production

information

发明人：Yukihiro Shibata,Shunji Maeda申请号：US118629申请日：20070103公开号：US07299147B2公开日：20071120

专利附图：

摘要：A system for managing production information includes a defect informationdatabase, a defect information collection unit, and a manufacturing apparatus informationmanaging unit. The defect information database stores defect information including a

coordinate value of a defect portion and a defect feature amount which are detected byinspecting a specimen processed in a device manufacturing line by using an opticalinspection apparatus having an ultraviolet light source. The defect information collectionunit at least one of collates and retrieves defect information from the defect informationdatabase and judges a fatality of a defect. The manufacturing apparatus informationmanaging unit which processes information stored in the defect information collectionunit and stores information on transition of yield and maintenance condition of amanufacturing apparatus in the device manufacturing line.

申请人：Yukihiro Shibata,Shunji Maeda

地址：Fujisawa JP,Yokohama JP

国籍：JP,JP

代理机构：Antonelli, Terry, Stout & Kraus, LLP.

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