专利名称：Encapsulation structure including trenches
partially filled with getter material
发明人：Baillin, Xavier申请号：EP14195216.8申请日：20141127公开号：EP2897162A1公开日：20150722
专利附图：
摘要：the encapsulation structure comprising at least: a hermetically sealed cavity, inwhich a micro device is encapsulated. a substrate (102), a face (115) defines one side ofthe cavity. at least two trenches (116) formed through the face of the substrate, each
trench interior volume communicating with each other. - the early portion of gettermaterial (112) comprising at least a part of side walls of the trenches, and fully meet thetrenches and covering a trench in the face of the substrate. an opening (130) carried outthrough one of the first portion of the getter material or through the substrate andconnecting the interior volume with a volume of disposed within the cavity.
申请人：Commissariat à l'Énergie Atomique et aux Énergies Alternatives
地址：25, rue Leblanc Bâtiment \"le Ponant D\" 75015 Paris FR
国籍：FR
代理机构：Brevalex
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