专利名称：Differential capacitive transducer and
method of making
发明人：Wilner, Leslie Bruce申请号：EP94117848.5申请日：19910306公开号：EP0644427A1公开日：19950322
专利附图：
摘要：A differential variable capacitance acceleration sensor includes a sandwichstructure having three stacked plates (10, 40, 60) of silicon with the centre plate (10)mounted such that its centre portion (12) is enabled to move in a sealed cavity with each
side thereof moving toward and away from a fixed cooperating plate (40, 60) forming theopposite side of a capacitive circuit. The centre portion (12) or mass of the centre plate(10) is suspended from its rim (14) by means of a large number of integral fingers (18, 20)extending from the rim (14) to the top and bottom surfaces of the centre portion (12).This centre mass (12) includes a number of through holes (16) to permit the passage ofair from one side to the other and may also include grooves to aid in the flow of air. Thefixed top plate (40) or lid and the base (60) also have, or may have, grooves (46, 66) toassist in the passage of air. The integral fingers (18, 20) are formed in sinuous curves orother form varying from straightness but having a significant tension such that when thecentre mass (12) is displaced during a sensed acceleration, the fingers (18, 20) tendtoward straightness. In an alternative embodiment, the fingers are bars (108) havingcorrugations stepped between different planes.
申请人：ENDEVCO CORPORATION
地址：30700 Rancho Viejo Road San Juan Capistrano, California 92675 US
国籍：US
代理机构：Greenwood, John David
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