APPARATUS FOR AND METHOD OF DISPENSING CHEMICAL SO

专利名称：APPARATUS FOR AND METHOD OF

DISPENSING CHEMICAL SOLUTION IN SPIN-COATING EQUIPMENT

发明人：Seung-Ki CHO申请号：US11867744申请日：20071005

公开号：US20080107796A1公开日：20080508

专利附图：

摘要：A chemical solution is uniformly dispensed from a nozzle by Nin spin-coatingequipment. The dispensing apparatus includes a canister configured to receive a bottle

containing the chemical solution, gas supply piping connecting a source of Nto the insideof the canister, a pressure control valve disposed in the gas supply piping, a chemicalsupply line by which the bottle is connected to the nozzle, a pressure sensor for sensingthe pressure of the chemical solution supplied from the bottle, and a controller thatcontrols the pressure control valve on the basis of the pressure sensed by the pressuresensor. The controller opens the pressure control valve further when the value of thesignal output by the pressure sensor is less than a value representative of the minimumof a predetermined pressure range, and closes the pressure control valve further whenthe value of the signal output by the pressure sensor is greater than a value

representative of the maximum of the predetermined pressure range. The degree towhich the pressure control is open is thus controlled by feedback from the pressurecontrol sensor such that the pressure of the chemical solution remains substantiallyconstant as it is dispensed from the nozzle.

申请人：Seung-Ki CHO

地址：Hwaseong-si KR

国籍：KR

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