专利名称：Optical measuring system, and a projection
objective
发明人：Hubert Holderer,Werner Lang,Alexander
Kohl,Bernhard Gellrich,HartmutBrandenburg,Johannes Rau,ArminSchoeppach
申请号：US107571申请日：20040114
公开号：US20040257675A1公开日：20041223
专利附图：
摘要：An optical measuring system is provided with a measuring machine that has atleast one measuring element for determining locations and at least one measuringelement for determining angles. At least one common reference surface is provided forthe location-determining measuring element and the angle-determining measuringelement.
申请人：CARL ZEISS SMT AG
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