Appearance inspection apparatus and appearance ins

专利名称：Appearance inspection apparatus and

appearance inspection method

发明人：Akio Ishikawa申请号：US11405984申请日：20060417

公开号：US20060245635A1公开日：20061102

专利附图：

摘要：The appearance inspection apparatus comprises: imaging unit which captures animage of the surface of a substrate; pixel comparing unit which compares pixels betweenimages captured of a plurality of substrates, the pixels being located in corresponding

positions in the captured images of the substrates; and defect detecting unit whichdetects one or other of the pixels associated with the plurality of substrates as a defectwhen the pixel associated with one of the substrates differs in pixel value from the pixelassociated with the other one of the substrates.

申请人：Akio Ishikawa

地址：Tokyo JP

国籍：JP

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